Third Canadian Workshop on MEMS

Applying MEMS in Canada: Challenges and Methods

August 22, 2003
Château Laurier Hotel, Ottawa, Canada
WORKSHOP ABSTRACTS
Number Title Author University/Company
1 Modeling and Analysis of Step-Based Silicon Surfaces at Facet Boundaries during Wet Anisotropic Etching I. Stateikina,   L.  Landsberger, M. Kahrizi   Concordia University
2 MEMS Design for Manufacturability (M-DFM)  M. G. da Silva Coventor Inc.
3 Investigation of Micromachined Scratch Drive Actuators L. Hunt, T. Hubbard, M. Kujath Dalhousie University
4 Design of Micro Ring Thermal Actuators YJ. Lai, J. MacDonald, T. Hubbard, M. Kujath Dalhousie University
5 Using Micro Actuators Underwater  D. Sameoto, T. Hubbard, M. Kujath  Dalhousie University
6 Prototyping of Polymeric Microfluidic Devices With Hot Embossing T. Koerner, L. Brown and R. D. Oleschuk Queen’s University
7 Microassembly of Micro-Parts into 3D Microstructures using a Passive, Compliant Microgripper N. Dechev, W. Cleghorn, J. Mills University of Toronto
8 MEMS Microtweezers for the Manipulation of Micron Size Objects S.K. Jericho and M.H. Jericho Dalhousie University
9 A Compact Optical Power Equalizer Based on a Two-dimensional MEMS Micro-mirror Array  X. D. Hoa and A.G. Kirk McGill University
10 MEMS Micro-mirrors for Misalignment Compensation in Free-space Inter-chip Optical Interconnects J. Prentice and A. Kirk McGill University
11 MetalMUMPs Tunable Capacitor  D. Yan, R. Mansour,  A. Khajepour  University of Waterloo
12 Modeling of MEMS Varactors as Phase Shifters for Multi-energy Domain Modeling in VHDL- AMS F. Jalal,  S. Bazaz, M. Hefnawi, D. Choi Royal Military College, CMC microsystems
13  Electrical Conductivity Experiment on Phospholipids  H. Cho and M. Parameswaran  Simon Fraser University
14 Design and Modeling of a Single Digital Input Bistable Switch I. Foulds and M. Parameswaran Simon Fraser University
15 A Computional Model for Simulation of Dielectrophoresis for Handling Bioparticles G.F. Yao, B. Saberi and S. Saberi Simulations Group Inc. Canada, Flow Science Inc. USA 
16 MEMS Devices for Telecommunications Using Synchrotron X-ray Lithography D. Klymyshyn , V. Subramanian , A. Kachayev  , D. Haluzan, Z. Ma, C. Ren , X. Chen, J. McMullin, C. Haugen, S. Achenbach TRLabs,  University of Saskatchewan, University of Alberta,  Forschungszentrum Karlsruhe (Germany)
17 Modeling of Dissipative Processes in Dynamic Bio-MEMS Applications H. Said, K. Kaler University of Calgary
18 Piezolectrical Micro-generator for Implantable Bio-devices R. Sharaf1 , W. Badawy  and W. Mausa University of Calgary, University of Alberta
19 Heterodyne Electrostatic Force Probing: A Tool for Characterizing Mechanical Dynamics in MEM Structures K.M. Cheng, D.R. Oliver, D.J. Thomson and G.E. Bridges University of Manitoba
20 Matched Impedance Cantilever for High Frequency
Scanning Probe Microscopy		 B.Q. Liang, Z. Weng, G.E. Bridges, C. Shafai and D.J. Thomson University of Manitoba
21 Micromachined Microstrip Phase Shifter D. Chrusch, C. Shafai, L. Shafai and S. Sharma University of Manitoba
22 The Design and Analysis of Piezoelectrically Actuated Microfluidic Systems P. Chiarot, R. Ben Mrad, P. Sullivan University of Toronto
23 A CMOS-MEMS VCO Tamer Riad and Raafat R. Mansour University of Waterloo
24 RF MEMS Multi-Port Switches M. Daneshmand, and R. R. Mansour University of Waterloo
25 A Wide Tuning Range MEMS Variable Capacitor  M. Bakri-Kassem and R. Mansour University of Waterloo
26 Rotating Micromirror Switching Element for Optical Switching M. A. Basha, S. Chaudhuri, S. Safavi-Naeini University of Waterloo
27 Heterogeneous MEMS Assembly E. Horne, M. Ellis, G. Skidmore, Raafat R. Mansour University of Waterloo, Zyvex Corporation
28 Thermal Plastic Deformation Assembly of MEMS N. Sarkar, A. Geisberger, A. Rohani,  R. Mansour, S. Chaudhuri, M. Ellis and G. Skidmore University of Waterloo, Zyvex Corporation
29 Bolometric FPA for Fingerprint Recording L. Le Noc, F. Picard, H. Jerominek, C. Alain, T. Pope, P. Topart, J. Godbout, C. Grenier, Y. Desroches, A. Martel, F. Cayer, P. Mailloux  INO
30 XeF2 Micromachining of SOI MEMS Structures Suitable for Optical Applications A. Bhaskar, M. Packirisamy, R. Bhat Concordia University
31 Experimental Investigation on the Dynamics of MEMS Structures Gino Rinaldi, Muthukumaran Packirisamy, Ion Stiharu Concordia University
32 MEMS Devices for RF Applications F. Nabki, T. Tsang, M. El-Gamal McGill University



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