The objective of this one-day workshop was to provide Canadian MEMS researchers with a forum for presenting the latest developments in MEMS research and with an opportunity to discuss these topics with individuals in the research and industrial communities.

In particular, the workshop examined the challenges and opportunities for MEMS research in several key technology sectors: RF MEMS, Bio-MEMS and Photonic MEMS.

The workshop included four presentations on the above-mentioned technology sectors, and a panel discussion on integration and commercialization.

There were two poster sessions-participants who submitted posters on related topics such as: RF-MEMS, Bio-MEMS, Photonics-MEMS, microfluidics, aerospace applications, packaging, integration with electronics, high voltage MEMS, or MEMS/Nano interface.

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